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发明名称
High frequency discharge plasma generating device
摘要
申请公布号
EP1411539(A3)
申请公布日期
2008.11.19
申请号
EP20030021701
申请日期
2003.09.25
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
RANK, ROLF, DR.;MORGNER, HENRY, DR.;SCHILLER, NICOLAS, DR.;WEISKE, DIETER;SCHMIDT, JOERG
分类号
H01J37/32;C23C16/513;H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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