| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a solar cell manufacturing method that improves characteristics such as photoelectric conversion efficiency by efficiently hydrogen-terminating crystal defects and crystal boundaries existing in a semiconductor substrate. <P>SOLUTION: The solar cell manufacturing method is composed by including a step for crystallizing a hydrogenated amorphous silicon film 16 by heat treatment after forming the hydrogenated amorphous silicon film 16 on a semiconductor substrate already formed with a PN junction. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
