发明名称 SEMICONDUCTOR WAFER AND CUTTING METHOD THEREOF
摘要 A semiconductor wafer and a cutting method thereof are provided to release mechanical impact transferred to ridges by forming posts between the ridges along a ridge line. A semiconductor wafer comprises a substrate(31), a metal electrode(32), a ridge(33), and a post(34). A nitride based compound semiconductor is grown on the substrate. The metal electrode injects electric current to a laser diode on the substrate. The ridge projects laser lights. The post is installed between the ridge lines. The post is formed higher than ridge. The posts are installed alternately along a cleaving line(35).
申请公布号 KR20080091604(A) 申请公布日期 2008.10.14
申请号 KR20070034642 申请日期 2007.04.09
申请人 LG ELECTRONICS INC. 发明人 UM, KI YOUNG
分类号 H01L21/78 主分类号 H01L21/78
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