发明名称 PARALLEL FABRICATION OF NANOGAPS AND DEVICES THEREOF
摘要 <p>Disclosed are devices comprising multiple nanogaps having a separation of less than about 5 nm. Also disclosed are methods for fabricating these devices.</p>
申请公布号 WO2008121445(A2) 申请公布日期 2008.10.09
申请号 WO2008US53793 申请日期 2008.02.13
申请人 THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA;STRACHAN, DOUGLAS, R.;JOHNSTON, DANVERS, E.;GUITON, BETH, S.;DAVIES, PETER, K.;BONNELL, DAWN, A.;JOHNSON, ALAN, T., JR. 发明人 STRACHAN, DOUGLAS, R.;JOHNSTON, DANVERS, E.;GUITON, BETH, S.;DAVIES, PETER, K.;BONNELL, DAWN, A.;JOHNSON, ALAN, T., JR.
分类号 H01L21/04;C12N5/06;C12N9/00 主分类号 H01L21/04
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