LOADLOCK CHAMBER AND VENT METHOD ON THE SAME

摘要

A loadlock chamber and a venting method in the same are provided to prevent the freezing on a substrate by maintaining an inner temperature of the loadloack chamber over room temperature. A vent member(220) converts a vacuum state in an inner of a chamber(120) into an atmospheric pressure. During a pressure in the inner of the chamber is raised from the vacuum state to the atmospheric pressure by the vent member, a heating member(128) heats the chamber to prevent the falling of temperature in the inner of the chamber. The heating member is installed in the inner of the chamber. The heating member heats the chamber for maintaining the temperature in the range of 27 °C to 35 °C. The chamber is maintained at a temperature higher than room temperature by the heating member when the inner of the chamber is converted from the vacuum state to the atmospheric state.