发明名称 METHOD OF MANUFACTURING INTEGRATED CIRCUIT HAVING STACKED STRUCTURE AND THE INTEGRATED CIRCUIT
摘要 <p>Provided are a method of manufacturing an integrated circuit having a stacked structure by forming a crystalline semiconductor thin film on a crystalline or amorphous substrate and the integrated circuit. Accordingly, the method of manufacturing the integrated circuit having the stacked structure uses a method of growing a crystalline semiconductor thin film on a polycrystalline or amorphous substrate, so that the method can be easily performed at low costs, and high-speed processing and high-density integration can be achieved.</p>
申请公布号 WO2008069606(A1) 申请公布日期 2008.06.12
申请号 WO2007KR06334 申请日期 2007.12.07
申请人 SILICONFILE TECHNOLOGIES INC.;LEE, BYOUNG SU 发明人 LEE, BYOUNG SU
分类号 H01L21/3205 主分类号 H01L21/3205
代理机构 代理人
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