| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation device capable of controlling generation of heat by a frame section between adjacent electron beam transmission members, in an electron beam transmission unit. SOLUTION: In an electron beam irradiation device 1, electron beams EB emitted by an electron beam gun 10 are caused to converge by a convergence coil 6<SB>2</SB>when passing through an electron beam passing hole 2, are deflected in the Y axis direction by a deflecting coil 7 and are caused to irradiate the electron beam transmission unit 20 having a plurality of the electron beam transmission member 21 lined in the Y axis direction. An electron beam emission section of a cathode 11 and an electron beam transmission section of the electron beam transmission member 21 are similar in shape in the Z axis direction. Therefore, the electron beams EB emitted by the electron beam emission section can be easily caused to converge on the convergence coil 6<SB>2</SB>so as to make the image of the electron beams EB projected on the electron beam transmission member 21 coincide with the shape of the electron beam transmission section in the Z axis. COPYRIGHT: (C)2008,JPO&INPIT
|
