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发明名称
STICKSTOFF-OXIDIERUNG DER GEÄTZTEN MOS-GATE-STRUKTUR
摘要
申请公布号
DE60320440(D1)
申请公布日期
2008.05.29
申请号
DE20036020440
申请日期
2003.06.10
申请人
SPANSION LLC
发明人
HE, YUE-SONG;FASTOW, RICHARD M.;WANG, ZHI-GANG
分类号
H01L21/28;H01L21/336
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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