| 摘要 |
A coordinate transformation device for electrical signal connection is provided to prevent contact failure and reduce variation of contact resistances by securing electrical connection between an output terminal of a probe and an input terminal of a first wiring group. A coordinate transformation device for electrical signal connection comprises a contact assembly(100A), a first wiring group(1), and a second wiring group(2). The contact assembly is made of a resin film where a metal foil is attached to form a conductive pattern of an electric conductor having a probe function on the resin film by etching the metal foil, and laminated by a plurality of resin films to perform circuit test of a semiconductor chip by making contact between ends of the probes and electrode pads of the semiconductor chip at a time. The first wiring group is formed by using the resin film where a metal foil is attached, and forms a conductive pattern on the resin film by etching the metal foil, wherein an input terminal and an output terminal(15) of the conductive pattern protrudes from an outer periphery of the resin film, defining an output terminal pitch of the probe as an input pitch, and the output terminal has a larger pitch than the input terminal pitch in a first horizontal direction(y direction). The second wiring group defines the output terminal pitch of the first wiring group as an input terminal pitch and an output terminal has a larger pitch than the input terminal pitch in a second horizontal direction(x direction) perpendicular to the first horizontal direction. The input terminal of the first wiring group corresponding to one of the output terminals of the probe, comprises at least two terminals that independently drive within a yz plane. When the probe output terminal and the input terminal of the first wiring group are contacted and conducted with each other, one wall surface of a first terminal of the input terminal of the first wiring group makes contact with one side of the output terminal of the probe, and the other surface of a second terminal makes contact with an opposite side of the output terminal of the probe.
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