| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor element in which large vibration displacement can be produced, low voltage driving is possible and feeding electrodes can be collectively formed on one side. <P>SOLUTION: The ultrasonic motor element 100 is provided with an L1B2 mode driving part 10 and L1 mode driving parts 20A and 20B. The L1B2 mode driving part 10 is provided with a piezo-electric board 12, a first driving electrode 14 having four first electrode parts 14a to 14d arranged in two rows and two columns and a first ground electrode 16. The L1 mode driving parts 20A and 20B are provided with piezoelectric boards 22, second driving electrodes 24a and 24b and second ground electrodes 26a and 26b. The first ground electrode 16 is connected to the second ground electrodes 26a and 26b by a first external electrode 34, the first electrode parts 14b and 14c which are diagonally positioned are connected to the second driving electrodes 24a by second external electrodes 36a and 36b, and the first electrode parts 14a and 14d which are diagonally positioned are connected to the second driving electrodes 24b by third external electrodes 38b and 38a. <P>COPYRIGHT: (C)2008,JPO&INPIT |
