发明名称 |
Catadioptric Projection Objective |
摘要 |
A catadioptric projection objective for projecting a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, having: a first objective part for projecting an object field lying in the object plane into a first real intermediate image; a second objective part for generating a second real intermediate image with the radiation coming from the first objective part; a third objective part for generating a third real intermediate image with the radiation coming from the second objective part; and a fourth objective part for projecting the third real intermediate image into the image plane.
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申请公布号 |
US2008037111(A1) |
申请公布日期 |
2008.02.14 |
申请号 |
US20040576265 |
申请日期 |
2004.10.15 |
申请人 |
SHAFER DAVID;EPPLE ALEXANDER;DODOC AURELIAN;ULRICH WILHELM;SCHUSTER KARL-HEINZ |
发明人 |
SHAFER DAVID;EPPLE ALEXANDER;DODOC AURELIAN;ULRICH WILHELM;SCHUSTER KARL-HEINZ |
分类号 |
G02B17/08;G03F7/20 |
主分类号 |
G02B17/08 |
代理机构 |
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代理人 |
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