| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor unit that is compact and high in reliability, as well as its manufacturing method that is used to easily and conveniently manufacture such the sensor unit. SOLUTION: The sensor unit 1 is provided with a multi-axis motion sensor 2, an interposer 3 provided with a through electrode 53, and an active element built-in module 4, in this order in multi-step state. The multi-axis motion sensor 2 is provided with a sensor main unit 11 comprised of an SOI substrate having three-layer structure of silicon layer, silicon oxide layer and silicon layer, and glass substrates 12 and 13 that are arranged to pinch the sensor main unit. External wiring 35 is provided in the glass substrate 12 facing the interposer. The active element built-in module 4 incorporates an active element 65 in a substrate 61, and it is provided with a plurality of through electrodes 63 penetrating the substrate in the outside area from the active element and wiring for connecting the through electrodes and the active element. The through-electrodes 63 are bonded to the wiring 56 of the interposer 3. COPYRIGHT: (C)2008,JPO&INPIT |
