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申请公布号
JP2008503083(A)
申请公布日期
2008.01.31
申请号
JP20070516094
申请日期
2005.06.07
申请人
发明人
分类号
H01L21/20;H01L21/336;H01L29/10;H01L29/78
主分类号
H01L21/20
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