| 摘要 |
There is provided an optical element module comprising an optical element and a support structure supporting the optical element. The support structure comprises an actuator device and a gravity compensation device. The actuator device is mechanically connected to the optical element and adapted to exert an actuation force on the optical element, the actuation force accelerating the optical element. The gravity compensation device comprises a gravity compensator. The gravity compensator is mechanically connected to the optical element and adapted to exert a gravity compensation force on the optical element when a negative pressure is acting within the gravity compensator. The gravity compensation force counteracts at least a part of the gravitational force acting on the optical element. It will be appreciated here that more than one gravity compensator may be used to fully compensate the gravitational force acting on the optical element.
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