发明名称 METHOD AND STRUCTURE FOR SYMMETRIC CAPACITOR FORMATION
摘要 A structure and associated method for forming a structure. The structure comprises a first doped region, a second doped region, a third doped region, and a first shallow trench isolation structure formed within a substrate. The first doped region comprises a first dopant having a first polarity. The second doped region forms a first electrode of a capacitor. The third doped region forms a second electrode of the capacitor. Each of the second doped region and the third doped region comprises a second dopant having a second polarity. The first shallow trench isolation structure is formed between the second doped region and the third doped region. The capacitor comprises a main capacitance. The structure comprises a first parasitic capacitance and a second parasitic capacitance. The first parasitic capacitance is about equal to the second parasitic capacitance.
申请公布号 US2007278618(A1) 申请公布日期 2007.12.06
申请号 US20060421774 申请日期 2006.06.02
申请人 COLLINS DAVID S;DING HANYI;FENG KAI DI;HE ZHONG-XIANG;LIU XUEFENG 发明人 COLLINS DAVID S.;DING HANYI;FENG KAI DI;HE ZHONG-XIANG;LIU XUEFENG
分类号 H01L29/00 主分类号 H01L29/00
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