发明名称 |
METHOD FOR DEFECT DETECTION USING COMPUTER AIDED DESIGN DATA |
摘要 |
Images of areas of a wafer are generated and registered with respect to computer aided design (CAD) data to provide a registered images. Defects in the wafer are then detected by comparing the registered images to one another and defect location information is generated in CAD coordinates.
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申请公布号 |
US2007280527(A1) |
申请公布日期 |
2007.12.06 |
申请号 |
US20070669809 |
申请日期 |
2007.01.31 |
申请人 |
ALMOGY GILAD;BULLER BENYAMIN |
发明人 |
ALMOGY GILAD;BULLER BENYAMIN |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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