SYSTEM AND METHOD TO MEASURE NANO-SCALE STRESS AND STRAIN IN MATERIALS
摘要
A system for measuring stress and strain in a sample is provided. The system includes a sample holder operable to support the sample; a stress inducing assembly operable to apply force to a selected location on the sample to deform the sample by a selected distance in a range from about 0.1 angstrom to about a millimeter; and an interferometer operable to determine a surface topography of the deformed sample at a resolution in a range from about 0.1 angstrom to about a micron.
申请公布号
WO2007109616(A2)
申请公布日期
2007.09.27
申请号
WO2007US64310
申请日期
2007.03.19
申请人
WILLIAM MARSH RICE UNIVERSITY;UNIVERSITY OF SOUTHERN CALIFORNIA;LUTTGE, ANDREAS;UDWADIA, FIRDAUS;NEALSON, KENNETH H.;GOODMAN, STEVEN D.
发明人
LUTTGE, ANDREAS;UDWADIA, FIRDAUS;NEALSON, KENNETH H.;GOODMAN, STEVEN D.