A heat resistant negative working photosensitive composition that comprises (a) one or more polybenzoxazole precursor polymers (I), wherein x is an integer from about 10 to about 1000, y is an integer from 0 to about 900 and (x+y) is about less then 1000; Ar<SUP>1</SUP> is a tetravalent aromatic group, a tetravalent heterocyclic group, or mixtures thereof; Ar<SUP>2</SUP>