| 摘要 |
PROBLEM TO BE SOLVED: To improve vibration damping without coordinate transformation. SOLUTION: A stage system comprises a Y stage 2 moving on a damper stand 1, two Y-axis linear motors 3a, 3b for driving the Y stage in the Y direction, an X stage 4 moving on the Y stage 2, and an X-axis linear motor 5 for driving the X stage 4 in the X direction. A plurality of actuators for providing power to the damper stand 1 include two actuators 6a, 6b which, being disposed on the same line as the drive direction of the two Y-axis linear motors 3a, 3b, drive the damper stand 1. The ratio of drive commands of the two Y-axis linear motors 3a, 3b is set the same as the ratio of drive commands of the two actuators 6a, 6b. |
