发明名称 RAW POWDER MIXTURE FOR ITO SINTER
摘要 <p>A raw powder mixture for ITO sinter production which can give an ITO sinter having excellent properties. The raw powder mixture for ITO sinter production is obtained from a mixture of an indium oxide powder and a tin oxide powder and has a logarithmic differential curve of pore volume distribution in which the cumulative pore volume for the pore volume diameters of 0.01-1.0 µm is 3.0-7.0 cm&lt;SUP&gt;3&lt;/SUP&gt;/g. When this powder mixture is used to produce an ITO sinter, this ITO sinter can have extremely small pores therein. Thus, a sputtering target which is highly dense and has high quality can be supplied.</p>
申请公布号 WO2007072755(A1) 申请公布日期 2007.06.28
申请号 WO2006JP325046 申请日期 2006.12.15
申请人 MITSUI MINING & SMELTING CO., LTD.;MIWA, MASAHIRO;FUJIWARA, TAKASHI 发明人 MIWA, MASAHIRO;FUJIWARA, TAKASHI
分类号 C23C14/34;C04B35/01 主分类号 C23C14/34
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