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发明名称
用于半导体制程的帮浦设备
摘要
本发明系关于供半导体制程之用的帮浦设备。该设备可包括经组态以使物质流由大约分子压力转变为大约大气压力之单帮浦。
申请公布号
TW200721245
申请公布日期
2007.06.01
申请号
TW095137044
申请日期
2006.10.05
申请人
BOC集团公司
发明人
葛兰姆 杭特利
分类号
H01L21/00(2006.01);F04D5/00(2006.01)
主分类号
H01L21/00(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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