| 摘要 |
An optical scanning device includes a deflection element [2] that scans a radiation beam via a first optical system [3] over a surface [6]. The radiation reflected by the surface is converged on a detection system [8] by a second optical system. The first and second optical system together image the scanning centre of the deflection element on the detection system. The distance between the deflection element and the first optical system is preferably in the range 0.6 f<SUB>1</SUB> to 0.9 f<SUB>1</SUB>, where f<SUB>1</SUB> is the focal length of the first optical system. |
