| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stable and simple contact mechanism for preventing tip trace from deforming or being peeled off from elastic protrusion, after the tip trace contacts a specimen in a contacting apparatus. <P>SOLUTION: A carrier substrate, having at least one contact pad on a main face, is prepared. At least one elastic protrusion is formed on the main face, and has an upper face at a height substantially constant relative to the main face. The width of the upper face is significantly larger than the contact pad. A conductive structure is formed that connects at least one contact pad to the upper face of at least one protrusion. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
