RECIPROCATING DRIVE FOR SCANNING A WORKPIECE THROUGH AN ION BEAM

摘要

A reciprocating drive system and apparatus for scanning a workpiece through an ion beam are provided, where motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to the ion beam. A shaft rotatably driven by the rotor extends along the firs axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the workpiec thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanni the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and ti stator, therein generally determining a rotational position of the rotor and the stator. ® KIPO & WIPO 2007