| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can obtain displacements in all directions using a small actuating voltage and also can obtain large displacements, and to provide a micro system having the device and a method for manufacturing the actuator. SOLUTION: The electrostatic actuator is equipped with a fixed electrode (2) relative to at least one substrate (4), at least one flexible electrode (6) arranged facing the substrate, at lease one means fixed to the flexible electrode on a surface, facing the fixed electrode (2) and forming a pivot of the flexible electrode comprising a conductor, and a suspension means (11) of at least one flexible electrode, holding the flexible electrode at a stop position at a distance from the substrate (4). COPYRIGHT: (C)2007,JPO&INPIT
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