| 摘要 |
<p>A method for generating final align mark coordinates in a reticle frame generation software is provided to enable an engineer to obtain accurate data during setting up of a job file by preventing a layer mismatch in coordinate values inside a file containing the final align mark coordinates. An RFG(Reticle Frame Generator) software is executed in a workstation, which is used for manufacturing reticles(S100). The RFG software has various firmware, which is different from one another according to various semiconductor manufacturers. A reticle layout is obtained to define a scribe lane(S110). When a key cutting process is performed on the reticle layout to obtain final align mark coordinates(S120), the coordinates of the align mark are automatically extracted, and a common file is generated. Names of respective layers are compared with each other, such that layer mismatch is prevented(S130).</p> |
