| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary positioning device which can control a rotational angle with high accuracy, and has only a small size. SOLUTION: The rotary positioning device is formed of a rotary table 4, an ultrasonic motor 5 for rotatively driving the rotary table 4, and a rotation control section 6 for controlling the rotation of the rotary table 4. The rotation control section 6 is formed of a linear scale 12 for linearly moving according to the rotational angle of the rotary table 4, and a reading head 13 for detecting a moving distance of the linear scale 12. The linear scale 12 and the rotary table 4 are connected together via a plate spring 20, and upon rotation of the rotary table 4, its rotational force is transmitted via the plate spring 20 to the linear scale 12. At this time, a force component out of the rotational force, which is aimed in a radially internal direction, is absorbed by elastic deformation of the plate spring 20, and therefore the linear scale 12 linearly moves in a tangent direction of the rotation. COPYRIGHT: (C)2007,JPO&INPIT
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