| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a model forming system to form a model which may be used for assumption of quality of an object, on the basis of various kinds of information pieces not yet sufficiently selected using the assumption of the relationship with the quality of the object to be processed. <P>SOLUTION: The process data collecting apparatus comprises a plurality of sets of: a model forming apparatus 10 for forming a process-quality model indicating the relationship between the process state information and the inspection result information, on the basis of the process characteristic amount extracted from the process state information as the information related to the process state and the inspection result information about the processed objects; a data collecting unit 4a for collecting in the time series the process state information in the predetermined collecting period; a temporary storage administration unit 4b for temporarily storing the process state information collected by the data collecting unit to the primary data storing unit 4f of each process in unit of the process; and a characteristic amount extracting unit 4d for extracting the process characteristic amount from the information, based on the process state information stored in the temporary storage administration unit 4b. The collecting periods a, b, and c of the data collecting unit in the respective sets are made different here. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
