PRECISION DISPLACEMENT DEVICE

摘要

FIELD: instrument engineering. ^ SUBSTANCE: invention relates to precision instruments and it can be used as standard for determining displacements and linear dimensions of objects in nanometric range. Aim of proposed invention is creation of simple device to provide small (up to fractions of nanometer) displacements or carry out measurements of said displacements at required accuracy in horizontal and in vertical planes. Proposed precision displacement device contains plate made of piezoelectric material with electrodes applied to two opposite sides of plate and connected to voltage source. At least one mark is made on surface of one of electrodes of size from one atom of substance to several hundreds of nanometers. Plate can be made monocrystal of low-lag material with orientation of crystallographic axes providing, at supply of voltage to electrodes, changes of dimensions of plate in direction both parallel to and square to plane of electrodes. Electrodes are usually made of material resistant to oxidizing. Protective layer in form of diamond or sapphire film can be applied to upper electrode. At least one additional mark can be made on surface of protective layer. Electrodes can be connected either to impulse voltage source or to constant voltage source. ^ EFFECT: provision of simple device. ^ 13 cl, 4 dwg