| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a control device for ultrasonic motor that can improve the accuracy of the stop position. <P>SOLUTION: A controller 10 for driving the ultrasonic motor 3, that controls the movement of a moving body comprises: a displacement sensor 5 that detects the moving state of the moving body; a deviation calculation means (a step S4) that operates deviation ΔLd between a detected position Ld detected by the displacement sensor 5 and a target position L<SP>*</SP>; an integration operation means (a step S12) that integrates and calculates the deviation operated by the deviation calculation means; and an amplifier 4 that drives the ultrasonic motor 3, on the basis of an integration output outputted from at least the integration calculation means. The integration calculation means, comprises integration constant setting means (steps S5 to S9) each of which varies an integration constant ki into at least three stages, according to the degree of reduction, when the deviation ΔLd calculated by the deviation calculation means is in a downward trend. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
