发明名称 |
A METHOD AND A SYSTEM FOR AUTOMATICALLY CONTROLLING A CURRENT DISTRIBUTION OF A MULTI-ANODE ARRANGEMENT DURING THE PLATING OF A METAL ON A SUBSTRATE SURFACE |
摘要 |
An electroplating tool is operated in combination with a controller, which automatically determines the individual currents for a multi-anode configuration of the plating tool. The calculation of the anode currents may be based on sensitivity data and measurement data as well as on a desired target profile, so that a fast response with respect to process variations may be achieved even for a plating tool including a plurality of process chambers. |
申请公布号 |
KR20060090822(A) |
申请公布日期 |
2006.08.16 |
申请号 |
KR20067006278 |
申请日期 |
2006.03.30 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
BONKASS MATTHIAS;WOLLSTEIN DIRK;PREUSSE AXEL |
分类号 |
C25D5/00;C25D5/16;C25D7/12;C25D17/10;C25D21/12 |
主分类号 |
C25D5/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|