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发明名称
Method For Manufacturing Semiconductor Devices
摘要
申请公布号
KR100609235(B1)
申请公布日期
2006.08.02
申请号
KR20030095133
申请日期
2003.12.23
申请人
发明人
分类号
H01L27/092;H01L21/8228
主分类号
H01L27/092
代理机构
代理人
主权项
地址
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