| 摘要 |
PROBLEM TO BE SOLVED: To supply inspection data for correcting the detection result of the array tester, which is affected by the variations in sensitivity for the input signals of the array tester and by the parasitic capacitance of the signal line, to the array tester, in the active matrix type inspection substrate. SOLUTION: A calibrating pixel B is arranged on a feeding end or a non-feeding end of each signal line, and a storage capacity of the calibrating pixel B is made larger than the storage capacity of the inspected pixel A, thus making it possible to enhance detection sensitivity, when the array tester detects a charge stored in the storage capacitor. In this way, the array tester compares inspection data of the calibrating pixels B between the signal lines, thus making it possible to obtain data for correcting the output result of the array tester, which is affected by the variations in sensitivity for the input signals of the respective inspection pins of the array tester. Furthermore, the array tester compares the inspection data of the two calibrating pixels B, having the same configuration in the same signal line with each other, thus making it possible to obtain data for correcting the output result of the inspected pixel, which is affected by the parasitic capacitance in the direction of the signal line. COPYRIGHT: (C)2006,JPO&NCIPI |
