发明名称 FORMING AN INTERMEDIATE LAYER IN INTERCONNECT JOINTS AND STRUCTURES FORMED THEREBY
摘要 Methods of forming a microelectronic structure are described. Those methods comprise forming a first adhesion layer on a conductive layer, forming an intermediate layer on the first adhesion layer, and forming a barrier layer on the intermediate layer, wherein the intermediate layer comprises a coefficient of thermal expansion that is approximately between the coefficient of thermal expansion of the first adhesion layer and the coefficient of thermal expansion of the barrier layer.
申请公布号 US2006110916(A1) 申请公布日期 2006.05.25
申请号 US20040993609 申请日期 2004.11.19
申请人 发明人 RENAVIKAR MUKUL P.;BARNAK JOHN P.
分类号 H01L21/44 主分类号 H01L21/44
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