| 摘要 |
PROBLEM TO BE SOLVED: To realize a highly precise, highly reliable, high density liquid droplet jet head in a good productivity by a method wherein a liquid supply through-hole for supplying a liquid to a pressurizing liquid chamber of the liquid droplet jet head is processed by simultaneously using both of a cutting process by a dicer processing method, or the like and an etching method, or the like. SOLUTION: This liquid droplet jet head comprises a first substrate 1 having a liquid jet mechanism on its first face, a second substrate 2 and a third substrate 3. The liquid supply through-hole for supplying ink to a pressurized liquid chamber 6 is formed on the first substrate 1 by passing therethrough from the first face to the second face. The through-hole is formed by the cutting process by the dicer processing method from the first face to a prescribed depth and is formed by the etching process from the second face to a prescribed depth. Alternately, the through-hole is formed by the etching process from the first face to a prescribed depth and is formed by the dicer processing from the second face to a prescribed depth. COPYRIGHT: (C)2006,JPO&NCIPI
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