| 摘要 |
A differential pressure sensor chip ( 4 ) comprises a diaphragm for measuring a differential pressure and converts a pressure received by the diaphragm for measuring the differential pressure into an electrical signal. A static pressure sensor chip ( 5 ) comprises a diaphragm for measuring a static pressure and converts a pressure received by the diaphragm for measuring the static pressure into an electrical signal. The differential pressure sensor chip ( 4 ) and static pressure sensor chip ( 5 ) are mounted on a header ( 1 ) so that one surface of the differential pressure sensor chip ( 4 ) and one surface of the static pressure sensor chip ( 5 ) are exposed to the interior of a common pressure introducing chamber ( 17 ).
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