发明名称 Positioning device
摘要 A positioning device for positioning an object is presented. The positioning device includes a first drive unit and a second drive unit for positioning the object. The first drive unit has a first part connected to the object and a second part connected to a first part of the second drive unit. The positioning device further includes a permanent magnet system constructed and arranged to provide at least part of the force for accelerating or decelerating the object.
申请公布号 US7016020(B2) 申请公布日期 2006.03.21
申请号 US20040846832 申请日期 2004.05.17
申请人 ASML NETHERLANDS B.V. 发明人 MUNNIG SCHMIDT ROBERT-HAN
分类号 G03B27/58;H01L21/027;G03B27/54;G03B27/62;G21K5/10;H02K1/22;H02K41/00 主分类号 G03B27/58
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