| 摘要 |
An apparatus and method to generate ozone gas at a pressure significantly higher than ambient atmospheric pressure is described. In one embodiment, a dielectric plate is positioned in a floating arrangement within an insulated process cavity defined by a lower gasket, a window gasket, an upper gasket, and an electrode plate. A sealing plate is positioned on an exterior portion of the upper gasket. In one configuration, the sealing pate includes a sealing structure extending therefrom and in contact with the upper gasket. The sealing structure is configured to provided a focused sealing force to the upper gasket, window gasket, and lower gasket to seal and enable the process cavity to produce ozone within a predetermined range of output ozone gas pressure that is significantly greater than a surrounding ambient atmospheric pressure.
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