发明名称 Method and apparatus for deep sub-micron design of integrated circuits
摘要 A technique for adding filler metal polygons in metal layers on a chip area of an IC design. In one example embodiment, this is accomplished by computing a size of a filler metal polygon using chip design layout data. One or more regions on the metal layers of the IC design that do not meet metal density requirements are then identified. The identified one or more regions are then filled with one or more filler metal polygons as a function of the metal density requirement and coupling capacitance between metal lines.
申请公布号 US2006035456(A1) 申请公布日期 2006.02.16
申请号 US20050152876 申请日期 2005.06.15
申请人 ANALOG DEVICES, INC. 发明人 RAMAKRISHNAN SIVAKUMAR;PADMANABHAN NARASIMHA M.
分类号 H01L21/4763 主分类号 H01L21/4763
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