SIGNAL DETECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To detect signals with high accuracy from a specimen, under a simple magnetic shield environment, by improving the signal-to-noise ratio. SOLUTION: An object to be inspected (40) is provided with a plurality of sensors (30a-30c). Difference absolute value circuits (50a-50c) determine the absolute values of the differences between pairs of output signals of the sensors. A summing circuit (52) sums up the difference absolute values, to generate a final detection signal (S). COPYRIGHT: (C)2006,JPO&NCIPI