| 摘要 |
PROBLEM TO BE SOLVED: To enhance the measuring precision of hardness by enhancing automatic focus matching precision when the dimension of a cavity is measured in a hardness testing instrument. SOLUTION: The hardness testing instrument 1 is constituted so that the cavity K is formed in the surface of a sample S using an indenter 34 and the dimension of the cavity K is measured to calculate the hardness of the sample S and equipped with an imaging means (CCD camera 31) for imaging the surface of the sample S to acquire predetermined image data, an automatic focus matching means (CPU 10a, an automatic focus matching program and an AF control mechanism 32) for performing automatic focus matching when the dimension of the cavity K is measured on the basis of the image data acquired by the imaging means and a focus matching image region setting means (CPU 10a and a focus matching image region setting program) capable of setting image regions (focus matching image regions) A<SB>2</SB>and A<SB>3</SB>used in automatic focus matching. COPYRIGHT: (C)2006,JPO&NCIPI
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