METHOD AND APPARATUS FOR INSPECTING TUNNEL MAGNETO-RESISTANCE EFFECT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for inspecting a TMR element by which the stability and the reliability of the TMR element can be quickly and surely checked without breaking the element. SOLUTION: An initial resistance value of the TMR element is measured as a first resistance value, a resistance value obtained after applying a voltage higher than a normally-used voltage to the TMR element is measured as a second resistance value, and the TMR element is evaluated in accordance with a change degree of the second resistance value from the first resistance value. COPYRIGHT: (C)2006,JPO&NCIPI