| 发明名称 |
CAPACITANCE MANOMETER HAVING A RELATIVELY THICK FLUSH DIAPHRAGM UNDER TENSION TO PROVIDE LOW HYSTERESIS |
| 摘要 |
A capacitance diaphragm gauge (100) for measuring pressure includes a flush diaphragm (120) mounted to a body structure (110) via a shim (122) or other raised perimeter portion.
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| 申请公布号 |
KR20050113661(A) |
申请公布日期 |
2005.12.02 |
| 申请号 |
KR20057017770 |
申请日期 |
2004.03.17 |
| 申请人 |
HORIBA STEC, INC. |
发明人 |
FERRAN ROBERT J. |
| 分类号 |
G01L9/00;G01L9/12;H01L;(IPC1-7):G01L9/12 |
主分类号 |
G01L9/00 |
| 代理机构 |
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代理人 |
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