| 发明名称 |
Method for manufacturing resonator |
| 摘要 |
A method for manufacturing a resonator of the present invention includes the steps of (a) forming a resonator film including a piezoelectric film made of piezoelectric material and (b) preparing a resonator substrate for supporting the resonator film. The method further comprises the step of (c) bonding the resonator film formed in the step (a) and the resonator substrate prepared in the step (b).
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| 申请公布号 |
US2005255234(A1) |
申请公布日期 |
2005.11.17 |
| 申请号 |
US20050109864 |
申请日期 |
2005.04.20 |
| 申请人 |
KANDA ATSUHIKO;TSURUMI NAOHIRO;YAHATA KAZUHIRO;UEMOTO YASUHIRO;TANAKA TSUYOSHI;UEDA DAISUKE |
发明人 |
KANDA ATSUHIKO;TSURUMI NAOHIRO;YAHATA KAZUHIRO;UEMOTO YASUHIRO;TANAKA TSUYOSHI;UEDA DAISUKE |
| 分类号 |
H01L41/09;H01L41/18;H01L41/187;H01L41/22;H03H3/02;H03H9/00;H03H9/02;H03H9/17;(IPC1-7):H03H9/00 |
主分类号 |
H01L41/09 |
| 代理机构 |
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