发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To suck and support by a jig a collectively resin-sealed body having a generated warp when individualizing it into individual device regions by a rotational cutter in the state of supporting it by the jig, with respect to the collectively resin-sealed body wherein a wiring board having semiconductor chips provided respectively in the plurality of device regions is resin-sealed collectively. <P>SOLUTION: The contact of a jig 10 with a collectively resin-sealed body 20 is so shaped that it is provided in the more inside region than an outermost peripheral dicing line 15a provided in the supporting portion 12 of the jig 10. As far as such a shape is used, even in the state wherein the collectively resin-sealed body 20 having a generated upward convex warp is mounted on the supporting portion 12 of the jig 10, the side of the outer edge 22a of the collectively resin-sealed body 20 can be made lower than the sucking surface 12a of the supporting portion 12. Therefore, the space between the supporting portion 12 and a resin which tends to be made large in the case of the resin having a convex warp can be made small, and the collectively resin-sealed body 20 having a warp can be sucked and supported effectively. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005317799(A) 申请公布日期 2005.11.10
申请号 JP20040134434 申请日期 2004.04.28
申请人 RENESAS TECHNOLOGY CORP;RENASAS NORTHERN JAPAN SEMICONDUCTOR INC 发明人 OTSUKA MASARU
分类号 H01L23/12;H01L21/301;H01L21/56 主分类号 H01L23/12
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