发明名称 MANUFACTURING METHOD OF MAGNETIC HEAD SLIDER, MAGNETIC HEAD SLIDER AND MAGNETIC DISK DEVICE
摘要 A manufacturing method of a magnetic head slider 5 is to perform milling processes for at least three times to a slider main body 50 to form a flying surface, and thereby, the milling process is performed at variety of depths more than the number of milling processes. These three times milling process composed of: for example, a first milling processes forming a first mask on the slider main body 50 and performing a milling at a first depth; a second milling process changing the first mask to a second mask and performing the milling at a second depth, after the first milling process; and a third milling process changing the second mask to a third mask and performing the milling at a third depth, after the second milling process. Namely, a cycle of the masking, the milling, and a removal of the mask is performed three cycles, and thereby, milling surfaces with at least four varieties of heights or more can be formed easily.
申请公布号 SG115807(A1) 申请公布日期 2005.10.28
申请号 SG20050001876 申请日期 2005.03.29
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KAZURIHO YOSHIDA;JUN ITO;KAN TAKAHASHI;MITSUNOBU HANYU
分类号 C23F1/04;G11B5/187;G11B5/60;G11B21/21 主分类号 C23F1/04
代理机构 代理人
主权项
地址