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发明名称
FILM FORMATION APPARATUS AND FILM FORMATION METHOD AND CLEANING METHOD
摘要
申请公布号
SG114589(A1)
申请公布日期
2005.09.28
申请号
SG20020007346
申请日期
2002.12.04
申请人
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
发明人
SHUNPEI YAMAZAKI;MASAKAZU MURAKAMI
分类号
H01L21/20;C23C14/04;C23C14/12;C23C14/56;C23C14/58;(IPC1-7):C23C14/12
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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