发明名称 |
Robust heterodyne interferometer optical gauge |
摘要 |
A method for performing optical signal and beam distribution in a heterodyne interferometer. A planar lightwave circuit is provided including a plurality of waveguide optical transmission elements and an input coupler and an output coupler arranged along the optical transmission elements. Optical pathlengths of the transmission elements are matched between the input coupler and the output coupler to compensate for thermal effects. Reference and measurement optical phases are determined employing the input coupler and the output coupler.
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申请公布号 |
US6947621(B2) |
申请公布日期 |
2005.09.20 |
申请号 |
US20020051122 |
申请日期 |
2002.01.22 |
申请人 |
LOCKHEED MARTIN CORPORATION |
发明人 |
BELL, JR. RAYMOND MARK;PERKINS PATRICK ELLIOTT;AMES LAWRENCE LOWELL;ANDERSON WILLIAM WALTER |
分类号 |
G01B9/02;G01D5/353;G02B6/125;G02B6/14;(IPC1-7):G02B6/00;G02B6/26;G02B6/36 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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