PROBE DEVICE AND DISPLAY SUBSTRATE TESTING APPARATUS USING SAME

摘要

A plasma (7) having a certain density is generated between a test electrode (16) and an electrode (13) on a display substrate (11) comprising a TFT array which is a circuit under test, and a test signal is transmitted between the electrode (13) and the test electrode (16) via the plasma (7). With this technique, a probe means and a testing apparatus enabling to measure the electrical characteristics of the TFT array formed on the display substrate (11) in a non-contact manner can be provided.