发明名称 Production device for DLC film-coated plastic container and production method therefor
摘要 A production device for a DLC film-coated plastic container and a production method therefor, capable of forming DLC (diamond-like carbon) films simultaneously on the inner surfaces of a plurality of plastic containers, and reducing variations in film thickness. A production device for DLC film-coated plastic containers, for forming a plurality DLC films simultaneously, characterized by comprising a columnar external electrode ( 3 ) having housing spaces in which a plurality of plastic containers ( 7 a -7 d) can be disposed in parallel and independently, internal electrodes ( 9 a -9 d) respectively disposed in the housed containers ( 7 a -7 d), a matching box ( 14 ) connected to the external electrode ( 3 ) and impedance-matching a high-frequency load, and a high-frequency power supply ( 15 ) connected to the matching box.
申请公布号 US6924001(B2) 申请公布日期 2005.08.02
申请号 US20030433343 申请日期 2003.05.30
申请人 YOUTEC CO., LTD. 发明人 HAMA KENICHI;KAGE TSUYOSHI;KOBAYASHI TAKUMI;ARAKI TOMOYUKI
分类号 C23C16/04;C23C16/26;H01J37/32;(IPC1-7):B05D7/22;C23C16/458;C23C16/507;C23C16/509 主分类号 C23C16/04
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